Current unit name
6217 Advanced Lithography and Metrology
Unit (historical) note
Till Jan. 2022: 6217 X-ray Lithography and Metrology
Old DORA PID
psi-units:168
Unit level
Group (PSI)
Parent unit
PSI: 6200 X-ray Nanoscience and Technologies LXN
Unit identifier U2
6217
Last Update Dora1
2019-02-28T13:16:16.920Z